| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 6 | |
| #2 | WIPO (World Intellectual Property Organization) | 6 |
| # | Industry | |
|---|---|---|
| #1 | Basic materials chemistry | |
| #2 | Materials and metallurgy | |
| #3 | Machine tools |
| # | Name | Total Patents |
|---|---|---|
| #1 | Brosnan Sarah | 10 |
| #2 | Kraft Steven | 8 |
| #3 | Johnson Brittany | 6 |
| #4 | Pallikkara Kuttiatoor Sudeep | 6 |
| #5 | Petro Benjamin | 6 |
| #6 | Hung Low Fernando | 6 |
| #7 | Truffa Julianne | 4 |
| #8 | Zhang Na | 4 |
| #9 | Chang Juyeon | 4 |
| #10 | Hains Alexander W | 3 |
| Publication | Filing date | Title |
|---|---|---|
| WO2021081162A1 | Composition and method for silicon oxide and carbon doped silicon oxide cmp | |
| US2021115297A1 | Polishing composition and method with high selectivity for silicon nitride and polysilicon over silicon oxide | |
| WO2021081176A1 | Composition and method for selective oxide cmp | |
| US2021115301A1 | Self-stopping polishing composition and method | |
| WO2021081153A1 | Composition and method for dielectric cmp |