| # | Country | Total Patents | |
|---|---|---|---|
| #1 | China | 3 | |
| #2 | Republic of Korea | 3 | |
| #3 | Taiwan | 3 | |
| #4 | WIPO (World Intellectual Property Organization) | 3 | |
| #5 | Singapore | 2 | |
| #6 | United States | 1 |
| # | Industry | |
|---|---|---|
| #1 | Surface technology and coating | |
| #2 | Semiconductors | |
| #3 | Chemical engineering |
| # | Technology | |
|---|---|---|
| #1 | Cleaning | |
| #2 | Semiconductor devices | |
| #3 | Metallic material removal | |
| #4 | Metallic material cleaning | |
| #5 | Coating metallic material |
| # | Name | Total Patents |
|---|---|---|
| #1 | Tan Samantha | 13 |
| #2 | Chen Ning | 8 |
| #3 | Wang Jianqi | 5 |
| #4 | Samantha Tan | 2 |
| #5 | Ning Chen | 2 |
| Publication | Filing date | Title |
|---|---|---|
| KR20060114680A | Cleaning process and apparatus for silicate materials | |
| WO2005010947A2 | Cleaning masks | |
| US7091132B2 | Ultrasonic assisted etch using corrosive liquids |