Learn more

BROOKS AUTOMATION ASIA LTD

Overview
  • Total Patents
    20
About

BROOKS AUTOMATION ASIA LTD has a total of 20 patent applications. Its first patent ever was published in 2003. It filed its patents most often in Republic of Korea, WIPO (World Intellectual Property Organization) and Japan. Its main competitors in its focus markets semiconductors, optics and packaging and shipping are ASYS AUTOMATIC SYSTEMS GMBH & CO KG, ZHIWEI SEMICONDUCTOR SHANGHAI CO LTD and OIKAWA YOSHIAKI.

Patent filings in countries

World map showing BROOKS AUTOMATION ASIA LTDs patent filings in countries

Patent filings per year

Chart showing BROOKS AUTOMATION ASIA LTDs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Cheon Hyun 5
#2 Kim Chang Su 5
#3 Kim Hyung Jun 4
#4 Kim Yong Ki 4
#5 Jung Seung Bae 3
#6 Lee Jin Hyun 2
#7 Won Mi Hee 2
#8 Kil Young Nam 2
#9 Rho Tae Woo 2
#10 Kang Jae Ho 2

Latest patents

Publication Filing date Title
KR20120097019A Grease providing apparatus in vacuum chamber
KR20070082056A Transfer chamber for vacuum processing apparatus of substrate
WO2007094616A1 Load-lock chamber for vacuum processing of substrate
KR20070078402A Wrist plate of a transport robot
WO2007086713A1 Wrist plate of a transport robot
KR20070096669A Load-lock chamber
KR20070096160A Substrate detecting apparatus
KR20070090356A Substrate loading table of vacuum processing apparatus
KR20070090363A Load-rock chamber
KR20070090366A Load-rock chamber
KR20070079745A Transfer chamber for vacuum processing apparatus of substrate
KR100555340B1 Substrate transfer apparatus having detachable chambers and substrate process system having the same
KR20060024654A Method of detecting glass substrate for glass substrate transferring robot with dual arm
KR20050083200A Device and method for detecting broken edge of glass substrate
KR20050030005A Substrate cooling device of load lock device
KR20040106042A Aligner of load lock device