| # | Country | Total Patents | |
|---|---|---|---|
| #1 | China | 12 |
| # | Industry | |
|---|---|---|
| #1 | Semiconductors | |
| #2 | Machines | |
| #3 | Optics | |
| #4 | Measurement | |
| #5 | Surface technology and coating | |
| #6 | Control | |
| #7 | Chemical engineering | |
| #8 | Machine tools |
| # | Name | Total Patents |
|---|---|---|
| #1 | Rice Michael R | 1 |
| #2 | Cree M | 1 |
| #3 | Cong Yu D | 1 |
| #4 | Hudgens Jeffrey C | 1 |
| #5 | Synha A | 1 |
| #6 | Peijun Ding | 1 |
| #7 | Ming Xi | 1 |
| #8 | Lowrance Robert B | 1 |
| #9 | Englhardt Eric A | 1 |
| #10 | Cal-Heinrich Wenck | 1 |
| Publication | Filing date | Title |
|---|---|---|
| CN1955331A | Device for gas phase sedimentation on substrate | |
| CN1495118A | System for transporting chip carrier, its operation method and chip loading station |