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Methods for forming an array of MEMS optical elements
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MEMS devices monolithically integrated with drive and control circuitry
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Reconfigurable optical add drop multiplexers with integrated power equalization
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Spatial light modulator with hidden comb actuator
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Integrated fiber, sensor and lens arrays for optical networks
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Defect detection and repair of micro-electro-mechanical systems (MEMS) devices
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Deep-well lithography process for forming micro-electro-mechanical structures
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Pattern-transfer process for forming micro-electro-mechanical structures
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Multi-axis micro-electro-mechanical actuator
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Micro-electro-mechanical variable optical attenuator
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Micro-opto-electro-mechanical switching system
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