|
CN112261526A
|
|
MEMS acoustic sensor
|
|
US2021002125A1
|
|
Motion control structure and actuator
|
|
CN111769082A
|
|
ASIC chip and manufacturing method
|
|
CN111762751A
|
|
MEMS conductive piece and preparation method of conductive coating
|
|
CN111757223A
|
|
MEMS microphone chip
|
|
CN111682098A
|
|
Piezoelectric structure and piezoelectric device
|
|
CN111682097A
|
|
Piezoelectric structure and piezoelectric device
|
|
CN111620297A
|
|
Deep cavity etching method
|
|
CN111504291A
|
|
Gyroscope
|
|
CN111554799A
|
|
Planarization method
|
|
CN111554800A
|
|
Planarization method
|
|
CN111405441A
|
|
Piezoelectric type MEMS microphone
|
|
CN111405402A
|
|
Microphone structure
|
|
CN111225331A
|
|
MEMS microphone
|
|
CN111328005A
|
|
Piezoelectric MEMS microphone
|
|
CN111294715A
|
|
Piezoelectric MEMS microphone
|
|
JP2020154296A
|
|
Imaging device having hand-shake correction function
|
|
CN111263283A
|
|
Optical microphone
|
|
CN111107268A
|
|
Camera device with hand shake correction function
|
|
CN111203375A
|
|
Transducer and manufacturing method thereof
|
